Atlas Copco – Dry Rotary Vane
Oil-Free Industrial Vacuum Solution
Overview
Oil-free dry vacuum pumps operate without oil in the compression chamber, making them ideal for clean, contamination-free processes. These pumps are designed for industries where product purity, environmental safety, and low operating cost are important. Dry vacuum pumps are increasingly preferred in modern manufacturing plants due to their low maintenance and eco-friendly operation.
Key Applications
- Pharmaceutical and biotech manufacturing
- Chemical and specialty chemical industries
- Electronics and semiconductor plants
- Food and beverage processing
- Cleanroom and laboratory applications
Key Benefits
- 100% oil-free operation
- No risk of oil contamination
- Lower maintenance and operating costs
- Suitable for corrosive and process gases
- Environmentally friendly vacuum solution
Atlas Copco Products
Select a product to view details and technical specifications.

DWS 200–500
Dry screw fixed speed vacuum pumps
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DWS VSD+ Series
Dry screw vacuum pumps with built-in VSD
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DSS Series
Dry scroll vacuum pumps
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DVS Series
Dry rotary vane vacuum pumps
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DZS A Series
Dry stainless steel mono claw vacuum pumps
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DZS VSD+ Series
Dry stainless steel claw vacuum pumps with VSD
View specificationsDWS VSD+ Series
Dry screw vacuum pumps with built-in VSD
| Model | Flow (m³/h) | Nominal power (kW) | Max. vacuum (mbar.a) |
|---|---|---|---|
| DWS 450 VSD+** | 100 – 450 | 11 | 0.01 |
| DWS 750 VSD+** | 100 – 750 | 22 | 0.01 |
* Nominal motor power at atmospheric pressure. ** Only water-cooled variants.
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